压电式轴上六维力传感器的研制.pdfVIP

学兔兔 第31卷 第1期 仪 器 仪 表 学 报 Vo1．31 N0．1 2010年 1月 Chinese Journal of Scientitic Instrument Jan．2010 压电式轴上六维力传感器的研制 张 军，李寒光，李映君，钱 敏 (大连王甲』=大学机械T程学院 大连 1 16024) 摘 要：本文对现有的六维力传感器及其力敏元件进行分析和研究，研制了一种能准确测量轴上空问六维力的新型四支点压电 石英并联式轴 六维力传感器。选择 电石英作为四支点六维力传感器的力敏元件，提山了两种不同的力敏元什空间布置方式， 对其建立了数学模型和解耦计算，得到作用在轴卜的 问六维力。分析了压电石英传感器测量轴上入维力产牛偏差的原因，通 过实验进行了验汪，确定出压电石英六维力传感器的力敏元什相对合理的布置方式，为轴J一六维力测量提供了参考依据。 关键词：六维力；压电石英；菱形布置；正方形布置；静态标定 中图分类号：TH823 文献标识码：A 国家标准学科分类代码：460．4020 Development of piezoelectric six-axis force sensor on axis Zhang Jun，Li Hanguang，Li Yingjian，Qian Min (School ofMechanical Engineering，Dalian University ofTechnology,Dalian 116024，China Abstract：Through analyzing and comparing existing different kinds of sensors and force—sensitive elements，this paper develops a novel six—axis piezoelectric quartz force sensor on axis with four supporting points，which can accurately measure six—dimensional forces／torques on axis．Piezoelectric quartz crystal is selected as the force—sensitive element of the six—axis piezoelectric quartz force sensor with four supporting points．Two different arrangements of the four group piezoelectric quartz crystals are put forward．The corresponding mechanical mod— els are built，the decoupling computation is carried out，and then the space six—axis forces on axis can be obtained． The causes of the deviation of the six—axis force measurement on axis for different arrangements are analyzed． Static calibration experiments are designed to determine the reasonable arrangement of the four group piezoelec— tric qua~z crystals，which provide a reference basis for the design of six—axis force sensor． Key words：s