可溯源至质量的静电力复现与测量技术.pdfVIP

学兔兔 第32卷 第5期 仪 器 仪 表 学 报 Vo1．32 No．5 2011年5月 Chinese Journal of Scientific Instrument Mav．2011 可溯源至质量的静电力复现与测量技术术 齐永岳，刘 明，林玉池，付鲁华 (天津大学精密测试技术及仪器国家重点实验室 天津 300072) 摘 要：为实现10。N以下微小力值的测量及溯源，提出了一种高精度、可溯源至质量的微小力值测量系统，采用受控静电 力发生装置复现微小力值，其基本工作原理是基于一种精密设计的圆柱形电容器，电容器内外电极同轴，外电极固定不动作 为参考电极，内电极由弹性机构支撑和导向，通过改变内外电极间的电压产生静电力，从而将力学量追溯至电容及电压等电 学量，利用砝码质量与静电力平衡的原理，可以实现微小力值的溯源。实验结果表明：电容变化梯度为0．82 pF／mm，完全可 以复现10I¨～10 N范围内的静电力。 关键词：微小力值；电容变化梯度；静电力；电容传感器 中图分类号：TH82 文献标识码：A 国家标准学科分类代码：460．4030 Electrostatic force reproducing and measurement technology traceable to mass Qi Yongyue，Liu Ming，Lin Yuchi，Fu Luhua (State Key Laboratory of Precision Measurement Technology and Instrument， Tianjin University，Tianjin 300072，China) Abstract：To realize the measurement and traceability of micro force value below 10～N，a micro force measuring system traceable to mass standard with high precision is proposed．A controlled electrostatic force generator is adopt— ed to reproduce micro force．The basic working principle is based on a precisely designed cylindrical capacitor with the outer electrode serving as the reference and the inner electrode suspended and guided by a rectilinear flexure mechanism．An electrostatic force is generated by the voltage between the electrodes SO that mechanical quantity is linked to electrical capacity。The capacitor can be used in a null—displacement mode to compare the electrostatic force with the force generated by the calibrated deadweight of a nominal mass．Experiments show that the capacitance