半导体生产过程.pptVIP

EE 4345 - Semiconductor Electronics Design Project Silicon Manufacturing Group Members Young Soon Song Nghia Nguyen Kei Wong Eyad Fanous Hanna Kim Steven Hsu HISTORY 19th Century - Solid-State Rectifiers 1907 - Application of Crystal Detector in Radio Sets 1947 - BJT Constructed by Bardeen and Brattain 1959 – Integrated Circuit Constructed by Kilby Semiconductor Manufacturing Process Silicon Manufacturing Crystal Growth and Wafer Manufacturing FABRICATING SILICON Quartz, or Silica, Consists of Silicon Dioxide Sand Contains Many Tiny Grains of Quartz Silicon Can be Artificially Produced by Combining Silica and Carbon in Electric Furnice Gives Polycrystalline Silicon (multitude of crystals) Practical Integrated Circuits Can Only be Fabricated from Single-Crystal Material CRYSTAL GROWTH Czochralski Process is a Technique in Making Single-Crystal Silicon A Solid Seed Crystal is Rotated and Slowly Extracted from a Pool of Molten Si Requires Careful Control to Give Crystals Desired Purity and Dimensions CYLINDER OF MONOCRYSTALLINE The Silicon Cylinder is Known as an Ingot Typical Ingot is About 1 or 2 Meters in Length Can be Sliced into Hundreds of Smaller Circular Pieces Called Wafers Each Wafer Yields Hundreds or Thousands of Integrated Circuits WAFER MANUFACTURING The Silicon Crystal is Sliced by Using a Diamond-Tipped Saw into Thin Wafers Sorted by Thickness Damaged Wafers Removed During Lapping Etch Wafers in Chemical to Remove any Remaining Crystal Damage Polishing Smoothes Uneven Surface Left by Sawing Process THE CRYSTAL STRUCTURE OF SILICON A Unit Cell Has 18 Silicons Atoms Weak Bonding Along Cleavage Planes Wafer Splits into 4 or 6 Wedge-Shaped Fragments Miller Indices is Used to Assign to Each Possible Plane Passing Through the Crystal Lattice Silicon Manufacturing Photolithography Photolithography Photolithography Photoresist Photolithography Photoresist Photolithography Photoresist PhotolithographyModel Figure 1a shows a thin film of some material (