用于投影栅线法形貌测量的变形栅线图仿真研究.pdfVIP

第十一届全国实验力学学术会议 大连 2005 用于投影栅线法形貌测量的变形栅线图仿真研究 1 1 1 1 2 徐建强 王蕴珊 司书春 高成勇 云大真 1 山东大学物理与微电子学院 济南 250061，2 大连理工大学工程力学系 大连 116024 摘要 仿真栅线图越来越多地被用于投影栅线法预测和检测新算法和新方法的研究中。栅线图的仿 真，除正确地仿真出表面高度造成栅线弯曲的程度（相位变化量）以外，还应包含物体表面材质、 阴影、噪音、镜头畸变等，即仿真出的栅线图与实际采集的图像尽可能相象。本文中，对栅线图的 组成特点和仿真的必要性进行讨论，提出了利用照片和灰度作为仿真待测表面高度数据的方法,此 方法比以往用简单几何形状仿真物体表面,能更准确地验证各种算法的差异；在此基础上，推导出 仿真变形栅线公式，并进而提出仿真物体材质、阴影、噪音、镜头畸变等的方法，形成较完整的仿 真系统，为投影栅线法形貌测量研究提供了一个方便灵活的系统。 关键词 投影栅线法形貌测量；仿真；灰度图像；变形 Research on simulating grating image used in project grating profilometry 1 1 1 1 2 XU Jian-qiang , WANG Yun-shan , SI Shu-chun , GAO Cheng-yong , YUN Da-zhen 1 College of Physics and Microelectronics, Shandong University, Jinan 250061, China 2 Department of Engineering Mechanics, Dalian University of Technology, Dalian 116023, China Abstract: Project grating profilometry is still the hotspot presently. In the researching process, people advance many new methods constantly. In order to validate the correctness, flexibility and the ability of resist interference of the new method facilely and exactly, it needs some deformed grating image. Simulation is an economy, practical and facility method. It discussed the characteristic of projecting grating and the request for simulation arithmetic in this paper. Integrated method for simulating projected grating image was presented. The calculating expression of deformed grating was deduced. It can simulate