光学方法测微小距离的研究光学方法测微小距离的研究.doc

毕业（设计）论文 题 目 光学方法测微小距离的研究 专业班级 学 号 学生姓名 学 院 指导教师 指导教师职称 论文成绩 完成日期： 2013年 6月 1日 光学方法测微小距离的研究 Research on optical method measuring tiny distances 摘 要 微位移测量技术在科学与工业技术领域应用广泛，这是因为位移测量是压力、应力、速度、加速度、温度、流量等各种物理量的测量基础。微位移测量在许多行业都有相当大的需求，如电子、机械、医学、航空航天、土木工程等。 本文介绍了光学上测量微小距离的各种方法，从激光干涉法、光杠杆法、光栅尺法、激光三角法和光纤法几个类别对各种测微原理进行了分析和比较，并对各种方法的特点进行了归纳，同时对光学方法的发展趋势进行了概括。 关键词：；； Abstract Micro-displacement measurement technique is widely used in the field of Science and Industrial Technology,this is because the displacement measuring is the basic measurements of pressure, stress, velocity, acceleration, temperature, flow, and other physical quantities. Micro-displacement measurement has considerable demand in many industries, such as electronics, machinery, medical, aerospace, civil engineering. Optical method, with high sensitivity, immunity to electromagnetic interference, resistance to corrosion, explosion-proof, simple structure, small size, light weight, such as a series of unique advantages compared to traditional measurement methods. This paper introduces the various methods of optical measuring small distance from the laser interferometry, optical lever method, grating method, laser triangulation method, and fiber-optic method these categories were analyzed and compared The characteristics of the various methods are summarized ，the development trend of optical methods have been summarized too. Keywords: micro-displacement; optics; interference; Laser; optical lever; grating; fiber 目 录 目录 摘 要 I Abstract II 目 录 III 第一章 文献综述 1 1.1 课题背景 1 1.2主要研究内容 1 第二章 激光干涉法 2 2.1 背景 2 2.2 原理 2 2.2.1 零差激光干涉仪 2 2