2013_KLA.pptxVIP

下载本文档

12
0
约1.9千字
约 11页
2016-08-20 发布于河南
举报
版权申诉

2013_KLA.pptx

1、有哪些信誉好的足球投注网站（book118）网站文档一经付费（服务费），不意味着购买了该文档的版权，仅供个人/单位学习、研究之用，不得用于商业用途，未经授权，严禁复制、发行、汇编、翻译或者网络传播等，侵权必究。。
2、本站所有内容均由合作方或网友上传，本站不对文档的完整性、权威性及其观点立场正确性做任何保证或承诺！文档内容仅供研究参考，付费前请自行鉴别。如您付费，意味着您自己接受本站规则且自行承担风险，本站不退款、不进行额外附加服务；查看《如何避免下载的几个坑》。如果您已付费下载过本站文档，您可以点击这里二次下载。
3、如文档侵犯商业秘密、侵犯著作权、侵犯人身权等，请点击“版权申诉”（推荐），也可以打举报电话：400-050-0827(电话支持时间：9:00-18:30)。
4、该文档为VIP文档，如果想要下载，成为VIP会员后，下载免费。
5、成为VIP后，下载本文档将扣除1次下载权益。下载后，不支持退款、换文档。如有疑问请联系我们。
6、成为VIP后，您将拥有八大权益，权益包括：VIP文档下载权益、阅读免打扰、文档格式转换、高级专利检索、专属身份标志、高级客服、多端互通、版权登记。
7、VIP文档为合作方或网友上传，每下载1次，网站将根据用户上传文档的质量评分、类型等，对文档贡献者给予高额补贴、流量扶持。如果你也想贡献VIP文档。上传文档

2013_KLA

Common Technological Projects - CERN IsraelWorkshop at the Weizmann Institute March 3, 2013Joel Seligson, KLA-Tencor (Israel) Corp.KLA-Tencor OverviewGlobal leader in yield acceleration since 1976 Installed base ~22,700 tools 5,800 employees ~ 3,870 technical personnel in 17 countries $1.5B RD investments over last 4 years FY 2012 Revenue $3.2 billionKLA-Tencor MarketsWaferReticleLEDMetrologyService/AppsKLA-Tencor (Israel) CorporationFounded in 1986450 employees in Migdal HaEmek other sitesDevelops and manufactures overlay metrology toolsA global manufacturing center for KLA-Tencor CorporationOverlay metrology - technological challengeMeasure lateral shifts to an accuracy of 1nm.Optical measurements:Imaging-basedDiffraction-basedShrinking dimensions ? Technology developmentTopics of interestHigh-resolution systemsOptical fieldsSimulationsLight sourcesDetectors sensorsNanometer-scale structuresHigh-resolution systemsStandard methods:Increase numerical apertureDecrease wavelengthNon-standard methodsBiological applications, e.g. STEDNear-field imagingOptical fieldsInterferenceSingular fieldsNear-field interactionsManipulation of complex amplitude, coherenceSimulationsCalculation of optical fields in complex geometriesEffects of sub-resolution featuresInverse problemsEfficiency of simulation algorithms (speed, memory)Light sourcesThermal vs. coherent sourcesLuminance (brightness)CoherenceBandwidthShort-wavelength sourcesPulsed sourcesDetectors sensorsDetector characteristics:Spatial ? Mpixels 2Mp = standardSpectral ? lvisible = standardTemporal ? frame rate 100Hz = standardWell depth (1/Noise) ? 20…30ke- = standardCost - Fix $1k…3k = standard Above have tradeoffsWe want no tradeoffs (“…and I want it now!”)Nanometer-scale structuresCreating novel optical properties using nanometer-scale structuresSimulating nano-structure/optics interactionsUpdated 10/2012