《一种新型磁芯螺线管微电感的设计与优化》.pdfVIP

第38卷 第1期 电 子 器 件 Vol．38　 No．1 2015年2 月 ChineseJournal of Electron Devices Feb. 2015 Design and Optimization of A Novel Solenoid Microinductor with Magnetic Core Material ∗ GENG Yujie,QUBingjun ,YE Qi (Institute of Microelectronics,Tsinghua University,Beijing 100084,China) Abstract:A novel solenoid microinductor with a magnetic core,which is based on inductive coupling,has been de- TM signedusingHighFrequencyStructureSimulator(AnsoftHFSS ),andtheoptimizedgeometricalstructureparameters are obained,the length,widthandthicknessoftheinductorare7mm,6.6mmand0.44mmrespectively.Theperform- ance of the novel solenoid microinductor,which has been fabricated by a micro-electro mechanical system(MEMS) process,hasbeen characterized and analyzed using the Aglient E4294A RF impedance/ material analyzer. From the measurement resultsthat thehigh performance of inductance(L)and itsquality factor(Q)are obtainedfrom 1MHzto 20 MHz,which agreewellwiththe simulationresults.Besides,theL valueismorethan 16timesthanthat of ahollow inductor with the same geometrical parameters.At 10 MHz,theL value is 1.17 μH,andthe Qvalue ismorethan50. Key words:MEMS;magnetic core;solenoid microinductor;quality factor;HFSS - EEACC:2140;2575D　 　 　 　 doi:10.3969/j.issn.1005 9490.2015.01.011 一种新型磁芯螺线管微电感的设计与优化 ∗ 耿玉洁,曲炳郡 ,叶　 启 (清华大学微电子学研究所,北京 100084) 摘　 要:利用HFSS仿真软件对一种基于电感耦合的新型磁芯螺线管微电感进行设计,并优化得出其结构参数,该电感尺寸 × × 为7 mm 6.6 mm 0.44 mm。 利用Agilent E4294A射频阻抗/ 材料分析仪对微机