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Physica E ] (]]]]) ]]]–]]] Contents lists available at ScienceDirect Physica E journal homepage: /locate/physe Effect of substrate temperature on the structural, electrical and optical properties of ZnO:Ga thin films prepared by RF magnetron sputtering F. Wu a,b, L. Fang a,b,n, Y.J. Pan b, K. Zhou a, Q.L. Huang a, C.Y. Kong c a Department of Applied Physics, Chongqing University, Chongqing 400044, PR China b Key Laboratory of Optoelectronic Technology and Systems of the Education Ministry of China, Chongqing University, Chongqing 400044, PR China c Department of Applied physics, Chongqing Normal University, Chongqing 400030, PR China a r t i c l e i n f o a b s t r a c t Article history: Gallium doped zinc oxide (GZO) thin films were prepared by RF magnetron sputtering on glass Received 19 February 2010 substrates. The influence of substrate temperature (Ts) on structure, surface morphologies, chemical Received in revised form atomic compositions, electrical and optical properties was investigated by XRD, FE-SEM, XPS, Hall 27 June 2010 measurement and double-beam UV spectrophotometer, respectively. It is found that with increasing Ts, Accepted 14 July 2010 film crystallinity is improved, stress in the GZO films is obviously relaxed and concentrations of Ga atoms and oxygen vacancies increase. The lowest resistivity (1.41 103 O cm), and the highest figure