外文翻译--采用表面微加工技术制造微型行星齿轮减速器.docVIP

附录 附录一 英文材料 MICRO PLANETARY REDUCTION GEAR USING SURFACE-MICROMACHINING Abstract A micro planetary gear mechanism featuring a high gear reduction ratio with compactness in size ispresented in this paper. SUMMiT V is employed for the fabrication method so that the redundancy of assembling parts is eliminated. The design rules of which has also been checked. To make full use of the benefits of the surface- micro - machining, the planetary reduction gear is designed toward using the on-chip micro- engine. The expected gearreduction ratio is calculated and compared with the conventional chain gear mechanism. The microplanetary gear mechanism presented in this paper is expected to have 162:1 reduction ratio utilizing less space consumption. This is an order of magnitude higher than the previously reported design in a single reduction gear train. Keywords:MEMS, planetary gear, reduction gear surface-micromachining, SUMMiT V process Nomenclature a sun gear b planet gears c internal gear (fixed) d internal gear (rotary) n the number of units of gear train D diameter of the pitch circle N number of teeth P number of planets ?angular velocity Introduction The gear mechanisms in microelectro mechanical systems(MEMS) are commonly expected to generate high torque in the confined micro-size systems. However, it is generally difficult for the micro-scale systems to have such a high torque without having multiple reduction systems. The design of the reduction gear drive based on a planetary paradox gear mechanism can increase the torque within a compact area, since the microplanetary gear system has an advantage of high reduction ratio per unit volume [1]. However its mechanism is so complicated that relatively few attempts have been made to miniaturize the gear systems [2-3]. Suzumori et al. [2] used the mechanical paradox planetary gear mechanism to drive a robot for 1-in pipes forward or backward. They employed a single motor to drive the gear mechanisms with high reduct