AISI M2钢上磁控溅射TiN、TiAlN和TiAlVN薄膜的显微结构.pdfVIP

Trans. Nonferrous Met. Soc. China 24(2014) 2559−2565 Microstructures of TiN, TiAlN and TiAlVN coatings on AISI M2 steel deposited by magnetron reactive sputtering Cui-feng WANG1 2 2 , Shih-fu OU , Shi-yung CHIOU 1. Department of Mechanical and Electrical Engineering, Fujian Polytechnic of Information Technology, Fuzhou 350003, China; 2. Department of Mold and Die Engineering, National Kaohsiung University of Applied Science, Kaohsiung 80706 Received 28 October 2013; accepted 25 February 2014 Abstract: In order to study the effect of the microstructure with Al and V added TiN coatings, TiN, TiAlN and TiAlVN coatings were deposited on AISI M2 high-speed steels by magnetron reactive sputtering. The microstructures of all the coatings were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM) and transmission electron microscopy (TEM). The results indicate that the addition of Al into TiN coatings reduces their lattice constant, but a further addition of V into TiAlN coatings increases their lattice constant. Moreover, the growth morphologies for TiN, TiAlN, and TiAlVN indicate that adding Al and V has a tendency to improve the columnar structure. The (111) and (200) orientations of TiN, TiAlN, and TiAlVN are identified. The ε(Fe N−Fe N) phase occurs because a small amount of Fe is present in the coatings. The interlayers of TiAlN and TiAlVN have the 3 2 preferred orientation. The texture (columnar) structure of the ( 111) and (200) orientations is observed in the TiAlN and