直接面积法测量纳米硬度技术的研究_周亮.pdfVIP

1622 2005 11 周 亮 姚英学 哈尔滨工业大学, 哈尔滨, 150001 : 利用纳米压痕技术对单晶硅做纳米压痕试验, 得到其载荷- 压 曲线用原子力显 微镜测出压痕的三维形貌, 结合Matlab 软件, 直接计算出压痕的残余面积, 从而得到单晶硅的 纳米硬度值通过对直接面积法与Oliver - Pharr 方法测出的硬度值进行分析比较, 发现两种 方法得到的硬度值都有压痕尺寸效应, 但用直接面积法得到的硬度值比用Oliver- Pharr 方法 得到的硬度值尺寸效应更明显 一些 : ; ; ; ; : T B938. 2 : 1004 132( 2005) 22 2052 04 Research on Nanohardness Calculation Technology by Direct Area Method Zho Liang Yao Yingx e Harbin Instit te of T echnology , H arbin, 150001 Abstract: T he nanoindention experiments w ere completed on single crystal silicon and obtained load- depth c rve. Real 3- dimensional morphological images of resid al indentation w ere obtained by atomic force microscopy ( AFM) , and the resid al areas and hardness w ere calc lated by combining Matlab softw are directly from AFM images. The comparing and analysis hardness of Oliver- Pharr method and hardness of directly area method reveal that the tw o hardnesses appear indentation size effect ( ISE) as w ell in micro- nanoindentation, b t the ISE of direct area method is more prominent than Oliver- Pharr method. Key words: atomic force microscopy; nanoidentation; hardness; direct area method; single crystal silicon 0 引言 , M atlab , , , [ 1] AFM , , - , , [ 2~ 5] , 1 试验设备与过程 Oliver- Pharr , - , R a 5nm, MT S Nano