ICP-MS分析太阳级硅中杂质含量及分析实例-杜嘉斌.pptVIP

ICP-MS分析太阳级硅中杂质含量及分析实例 杜嘉斌 赛维LDK-技术研究院 赛维LDK检测中心ICP-MS实景 Elements Analyzed by ICP-MS - D.L. of ELAN DRC D.L. range 1 ppt 1 – 100 ppt 0.1 – 1 ppb Schematic Diagram of ELAN DRC Optional PFA Sample Introduction System Spray Chamber Pt Injector Ionization Process in Plasma Molecule Atom Ion Aerosol Particles Nebulization Desolvation Vaporization Dissociation Ionization Ca(OH)2 Ca Ca+ Ionization Efficiency of Elements in Ar Plasma 0 10 20 30 40 50 60 70 80 90 0 20 40 60 80 100 Atomic number Ionisation efficiency (%) Li Be B C Ba Mg Al Si P S Cl K Ca Sc V Ti Cr Mn Zn Ga Ge Cu Fe Ni Co As Se Br Rb Sr Y Zr Nb Mo Tc Ru Rh Pd Ag Cd In Sn Sb Te I Xe Cs Na Lanthanoides Hf Ta W Re Os Ir Pt Au Hg Tl Pb Bi Po Rn Ra Ac N F Kr He O Ne Ar Electron temperature : 6,680K Electron density : 1.4714 x 10 cm-1 First Ionization Potential of Elements Ar 15.75eV 0 10 20 30 40 50 60 70 80 90 0 5 10 15 20 25 Atomic number Ionisation potential (eV) He 24.58eV Li Be B C Ba Mg Al Si P S Cl K Ca Sc V Ti Cr Mn Zn Ga Ge Cu Fe Ni Co As Se Br Rb Sr Y Zr Nb Mo Tc Ru Rh Pd Ag Cd In Sn Sb Te I Xe Cs Na Lanthanoides Hf Ta W Re Os Ir Pt Au Hg Tl Pb Bi Po Rn Ra Ac N F Kr He O Ne Ar 8 eV Inside DRC NH3 + + + + + + + + ArO+ Fe+ Mn+ + + + + + + + + NH3 gas in + + + + + + + Ion-Molecule Reaction In DRC M IP(M) Ar 15.76 eV NH3 10.16 eV Ca 6.11 eV Ar+ + NH3 ? NH3+ + Ar D Hr = D IP = - 5.6 eV (Exothermic reaction) k = 1.60 X 10-9 cm-3 molecule-1 second-1(*) Ca+ + NH3 ? no reaction D Hr = D IP = + 4.0 eV (Endothermic reaction) k 10-13 cm-3 molecule-1 second-1 (*) + Ca+ + Ar+ NH3 + + + + + + ELAN DRC Quadrupole Mass Filter Binary gold metallized ceramic rods for hyperbolic quadrupole field. Proven rock-solid mass calibration stability. Rapid scanning characteristics. On-the-fly custom resolution. ELAN DRC Dual-Stage Discrete Dynode Detector Principle of Dual Mode Detector Analog counting Pulse counting Amp Discriminator Co