电极绝缘的压控型四轴静电悬浮支承技术.pdfVIP

第20 卷第6 期 中国惯性技术学报 Vol.20 No.6 2012 年12 月 Journal of Chinese Inertial Technology Dec. 2012 文章编号：1005-6734(2012)06-0729-05 电极绝缘的压控型四轴静电悬浮支承技术 刘建华，王秋良，王 晖 （中国科学院电工研究所 应用超导重点实验室，北京 100190 ） 摘要：基于经过绝缘化处理的支承电极，提出了压控型四轴静电悬浮支承系统的技术方案。首先给 出了支承系统的位移测量电路，介绍了在极限工作条件下可以将执行器件功耗降低 70%以上的低功耗 的高压放大器。推导了电极绝缘条件下的静电力模型，并引入加权系数来表征电极覆盖绝缘膜对静电 悬浮力的影响。根据建立的静电力模型设计了控制器并进行了悬浮实验。实验结果表明，支承系统实 现了转子的稳定悬浮，说明在合理量化电极绝缘对测量系统和静电力模型的影响条件下，电极绝缘的 静电悬浮支承系统可以实现正常工作。 关 键 词：静电支承；间隙电容；电极绝缘；电压控制 中图分类号：U666.1 文献标志码：A Bearing technology of voltage-controlled four-axis electrostatic suspension system with insulated electrodes LIU Jian-hua, WANG Qiu-liang, WANG Hui (Institute of Electrical Engineering, Chinese Academy of Sciences, Beijing 100190, China) Abstract: Based on the insulated electrodes, a technical proposal of voltage-controlled four-axis electrostatic suspension system was proposed. First, the measurement circuit of bearing system was given, and a low power consumption high voltage amplifier was introduced, which could reduce the power consumption of the actuator by over 70% under extreme conditions. Then the formula of electrostatic force acted on the rotor on basis of insulated electrodes was deduced, and a weighting coefficient was introduced to quantize the effect. Based on the model of electrostatic force, the controller was designed, and the suspension experiment was made. Experiment results show that the bearing system can suspend the rotor stably. Under the condition of reasonably quantizing the electrode insulation’s effects on the measurement circuit and the