毕业设计二维光学内反射微小角度测量的研究.docVIP

二维光学内反射微小角度测量的研究 Study on 2D Micro Angle Based on Internal Reflection Effectiveness 摘 要 为了解决上述问题本课题基于光学内反射效应，设计并试制了一种能够弥补传统测角仪器上述不足的新型二维微小角度传感器，实现二维角度的测量，为下一步设计出多自由度位移检测系统，实现对精密加工机床或坐标测量机的运动姿态及误差的测量奠定基础。以下是本论文的主要研究内容： 1 论述了本文研究的目的和意义，查阅了大量的有关技术资料，综合评述了角度测量技术的国内外现状和发展趋势。 2 从理论上分析了基于光学内反射效应测角法的原理。 3 设计制作了二维角度传感器装置及基于单片机系统的处理电路，对其技术性能、工作方法进行了实验研究，并对该角度传感器进行校正。 关键词：二维角度测量 内反射 光学差动测量法 临界角棱镜 Abstract In this paper,we design a new type of two-dimension micro angle sensor byusing new angle measurement method that is different from the traditional ones,andcan make up for the shortcomings mentioned above.This work prepares for the nextstep of designing a multi-dimension angle and displacement measurement system andto make a foundation of realizing the measurement of the moving status or errors ofprecision machining tool or coordinate measurement machine.Four items listedbelow show the main work that has been done in this paper. 1.The purpose of the study is presented.A large number of references are collected and referred to,leading to an overview of the current national andinternational situation and developmental trends in the field of micro anglemeasurement methods. 2.The new angle measurement method based on internal reflection effectiveness discussed theoretically. 3.The two-dimension angle sensor system and the measuring circuits based on MCU have been designed and fabricated.The technical characteristics and performance have been primarily discussed by experiment results.The calibrated method is also presented later. Keywords: Two-dimension angle measurement Internal reflection Optical heterodyne angle measurement method Critical Prism 目 录 1 1.1本课题的提出及其研究意义 1 1.2角度测量技术国内外发展概况 1 第二章 角度测量原理 7 2.1基于光学内反射效应测角法原理 7 2.2二维测角的光路设计 11 第三章 系统设计 14 3.1光源设计 14 3.2处理电路的设计 15 3.3软件设计 22 结 论 25 参考文献 26 致 谢 27 第一章 绪 论 1.1本课题的提出及其研究意义 随着现代工业及生产制造技术的飞速发展，生产加工技术已经从精密加工时代进入到超精密加工时代，与之相应的测量技术也从精密测量发展到超精密测量和纳米测量，而超精密加工机床及其评价检测技术则在超精密加工技术的发展中起着关键作用。加工精度取决于机械的运动精度、机械