《毕业设计：基于光栅的工具显微镜设计研究》.docVIP

PAGE  基于光栅尺的工具显微镜设计研究 Grating-based design of a tool microscope 摘 要 本文在熟悉CCD的直径测量工作原理相关理论基础之上，在实验室现有工具显微镜的基础上提出新的改进方案。完成基于CCD和光栅尺直径测量技术研究。CCD作为一种自扫描式光电接收器件,由于其具有尺寸小、重量轻、功耗小、超低噪声、动态范围较大、线性好、光计量精确、光谱响应范围宽、几何结构稳定、工作可靠和耐用等优点,且其线扫描输出光电信号有利于其后续信号处理,在物体几何尺寸的测量、位置测量、图样识别、光学测量等方面得到了广泛的应用。而且CCD传感器、光学系统、信号采集与处理构成的CCD光电非接触式尺寸测量系统的使用范围和优越性是现有其他测量方法无法比拟的。本文介绍的就是这样一种利用衍射原理实时精密测量细丝直径的线阵CCD测量系统。 关键词：CCD 衍射 细丝直径 精密测量 Abatract In this paper the diameter measurements with CCD principle theories foundation, the existing tool microscope in the laboratory is proposed on the basis of new improvement scheme. Complete based on CCD and grating measuring diameter technology research. Since the CCD as a scan photoelectric device, has received due to its small size, light weight, low noise, low consumption, large, linear dynamic range and light measurement precision, wide range of spectral response, geometrical structure stability, reliable and durable, and its advantages such as photoelectric signal output line scan for its subsequent signal processing, the object of geometry size measurement, the measurement and pattern recognition, the position of optical measurement etc widely application. By CCD sensor, optical system, signal acquisition and processing of CCD photoelectric non-contact measurement system using range and superiority of other measurement methods are incomparable. This paper is such a diffraction theory real-time measuring precision linear CCD filaments diameter measuring system. Key words: CCD diffraction; diameter of thin thread precision measurement.  PAGE \* MERGEFORMAT I 目 录 TOC \o 1-2 \h \u  HYPERLINK \l _Toc22002 第一章 绪 论  PAGEREF _Toc22002 1  HYPERLINK \l _Toc3284 1.1引言  PAGEREF _Toc3284 1  HYPERLINK \l _Toc5648 1.2研究目的  PAGEREF _Toc5648 1  HYPERLINK \l _Toc13540 1.3 CCD技术的发展现状  PAGEREF _Toc13540 2  HYPERLINK \l _Toc7237 第二章 测量系统原理  PAGEREF _Toc7237 13  HYPERLINK \l _Toc56 2.1CCD及其原理  PAGEREF _Toc56